Kinematic Modes Identification and Its Intelligent Control of Micro-Nano Particle Manipulated by Acoustic Signal

In this paper, the dynamics of a micro-nano particle on micro-thin plate driven by an acoustic signal was investigated, including kinematics mode, equation, and trajectory control. According to Newton’s kinematic theorem, analyzing forces acting particle, modes are distinguished with specific mathematical conditions, which classified as slide, bounce, stable strictly planned thin area. Based theory modal analysis, simulation results reveal distribution rules motion against driving or geometry. The equation governing sliding movement then derived in light interaction between signal, based which, drawn analyzed detail. For purpose controlling trajectory, control problem designed accordance linear active disturbance rejection controller (LADRC). Further, guidance law proposed, corresponding realize following.